Brooks GF40 (elastomer seal) thermal mass flow controllers (MFCs) and thermal mass flow meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications.
The Brooks GF40/GF80 Series is the perfect choice for customers who use
thermal mass flow controllers or thermal mass flow meters on a variety
of gases, who need to change gas type frequently, or who need to
re-range while preserving gas measurement and control accuracy.
Some
examples:
OEMs will reduce the number of gas- and range-specific MFCs that they inventory
Solar, biotech, CVD, plasma, glass, web coating, nanotechnology,
vacuum processing and similar large users of mass flow meters and mass
flow controllers will greatly reduce their gas- and range-specific
spares inventory
R&D, research, and laboratory users can quickly change
experiment conditions and achieve much better actual process gas
accuracy vs traditional mass flow controllers and mass flow meters