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GF40 Thermal Mass Flow Controller / Meter

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Brooks GF40 (elastomer seal) thermal mass flow controllers (MFCs) and thermal mass flow meters (MFMs) achieve unprecedented performance, reliability, and flexibility in many gas flow measurement and control applications.

The Brooks GF40/GF80 Series is the perfect choice for customers who use thermal mass flow controllers or thermal mass flow meters on a variety of gases, who need to change gas type frequently, or who need to re-range while preserving gas measurement and control accuracy. 

Some examples:

  • OEMs will reduce the number of gas- and range-specific MFCs that they inventory
  • Solar, biotech, CVD, plasma, glass, web coating, nanotechnology, vacuum processing and similar large users of mass flow meters and mass flow controllers will greatly reduce their gas- and range-specific spares inventory
  • R&D, research, and laboratory users can quickly change experiment conditions and achieve much better actual process gas accuracy vs traditional mass flow controllers and mass flow meters
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