5800 Series Mass Flow Controller

Setting the industry standard for thermal mass flow control and measurement, the SLA5800 series supports a wide flow measurement range and offers

Long-term Zero Stability: With a better zero drift specification compared to competitive products, SLA5800 MFCs maintain factory calibration and accuracy longer. This industry-best zero stability specification is made possible by our advanced thermal flow measurement sensor design.

Process Flexibility: SLA5800 Series covers an extremely broad range of flow rates. Model SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown ratio of 100:1 for any full scale range from 1-50 lpm N2 equivalent and 50:1 turndown for all other flow rates, accurate gas flow can be measured or controlled down to 0.06 ccm.

Improved Technology: With decades of experience in mass flow control technology, the SLA5800 series incorporates innovations such as all-digital electronics and superior mechanical configurations for ultra-fast response performance, as well as an improved accuracy specification for the reliable results you need.

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