NEMA 4X and IP66 Mass Flow Controller / Meter

Brooks Mfi series analog thermal mass flow meter & thermal mass flow controller products are designed specifically for use in harsh environments.

These devices’ unique NEMA 4X/1P66 enclosures provide protection from dust and water, making them ideal for indoor or outdoor use. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for a variety of service areas.

Features

• NEMA 4X, IP66 watertight construction
• UL and cUL listed and recognized for Class I Division 2 hazardous locations (Mfx)
• Wide FS flow range for measurement and control of gases from 3 sccm to 1000 slpm N2 (control) and 1000 slpm N2 (measurement)
• Flow control to 1000 slpm N2
• Flow metering to 1000 slpm N2
• Sensor: Removable (Mfi) / Welded (Mfx)
• Insensitive to mounting attitude
• Selectable response time
• Electrically activated valve override
• Low command flow cutoff
• Corrosion resistant valve

Download a datasheet